[labnetwork] furnace boat question

[Tony L Olsen]

Richard

In industry, we used to scribe our quartz frequently.  Don't remember any resulting cracks.  However, over time the scribe fades due to growths, depositions, and cleaning.  Best long-term option was to have the quartz vendor add text with a small bead of quartz.  But, both of those options are useless if people won't look.  Better, but still not fool-proof, would be to find a way to mate a specific boat to a specific tube/cantilever - although this adds complexity and increases inventory needs.

If you use different slot width's for the same diameter wafer, you might want to consider using only the largest slot width, but cut the slots at a 3 degree angle.  This forces all wafers to lean uniformly and can accommodate different wafer thicknesses with the same slot.

tonyO


Tony Olsen
Nanofab Cleanroom Supervisor/Process Engineer
University of Utah
36 S Wasatch Dr, Suite 2500
Salt Lake City,  UT  84112
801-587-0651 office
801-587-3077 fax
www.nanofab.utah.edu<http://www.nanofab.utah.edu/>



From: Morrison, Richard H., Jr <rmorrison at draper.com>
Sent: Friday, May 31, 2019 07:57
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] furnace boat question

HI Everyone,

We are having an issue controlling the quartz boats for our furnace operations. We use 4" and 6" boats with 2 different slot widths. DO you think we could lightly scribe a tube number and size on the rail of the boat? I am concerned that it would crack.

Rick


Richard H. Morrison
Principal Member of the Technical Staff
Draper
555 Technology Square
Cambridge, MA
02139-3573

Work  617-258-3420
Cell  508-930-3461
www.draper.com<http://www.draper.com>

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