[labnetwork] Issues with the Parylene Coater

[Vlahakis, James]

Hi Nava, we have the same system and noted similar at times but never that severe.

It may be the pathway to your process chamber is blocked - the parylene vaporizes, has no place to go and deposits right there. To check this shine a flashlight into the chamber where you normally load the dimer. At the process chamber, pull the flute out and look down - can you see the light? If not, or if the tubing seems much less than ~1" in diameter you have to clean out the accumulated parylene layers. You'll need a stiff wire brush long enough to reach all the way down. Also a vacuum - cleaning this will create a big, flaky mess.

jim



________________________________
From: labnetwork-bounces at mtl.mit.edu [labnetwork-bounces at mtl.mit.edu] on behalf of Nava Ariel-Sternberg [na2661 at columbia.edu]
Sent: Friday, September 13, 2019 1:09 PM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] Issues with the Parylene Coater

Greetings all wise fab-yodas,
We have an old SCS LABCOTER® 2 PARYLENE DEPOSITION SYSTEM that has been working great until recently. We are now experiencing problems with it. The deposition is occurring on the back door of the furnace (see picture) and not on the sample…
Has anyone seen this? It seems like a temperature issue but if someone experienced it and share advice and specifics that would be greatly appreicated.
Thanks,
Nava

[IMG_8837.jpg]
Nava Ariel-Sternberg, Ph.D.
Director of CNI Shared Labs
CEPSR/MC 8903
530 west 120th st. NY
NY 10027
Office: 212-8549927
Cell: 201-5627600



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