[labnetwork] ALD availability in the midwest

[Hathaway, Malcolm R]

Hello Jerry,

Here at Harvard CNS I'd be happy to process samples if users can get them delivered.  We have alumina, hafnia, silica, titania, and zirconia, as well as ZnO and Pt.

Only caveat is that user would need to become a CNS User, with all the attendant paperwork.


Mac Hathaway
Senior Process and Systems Engineer
Harvard CNS
617-259-0859
________________________________
From: labnetwork-bounces at mtl.mit.edu <labnetwork-bounces at mtl.mit.edu> on behalf of Shepard, Jeremiah J <jshepar at purdue.edu>
Sent: Monday, August 10, 2020 9:04 AM
To: labnetwork at mtl.mit.edu <labnetwork at mtl.mit.edu>
Subject: [labnetwork] ALD availability in the midwest

All,
Good morning!  I am an engineer with Purdue's Birck Nanotechnology fab.  Our ALD system has went down and will be down for several weeks.  I am looking for alternatives for our researchers to use until our system comes back online.  We are located in West Lafayette, Indiana and options would need to be within a few hours driving distance of our location, or provide the service through mail.

Our system is equipped with AlOx, HfOx,  and SiOx.  The majority of our users are growing AlOx and HfOx.  We have many users interested in low temp growths at 90 to 110 C and we have a limit of 50 nm film thickness.  We also have many users growing at more traditional 200 C temps.  I would expect work coming from our fab to fall within these parameters.

Any leads would be greatly appreciated!

Thank you,
Jerry Shepard

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