[labnetwork] ALD availability in the midwest

[Mario Portillo]

Purdue and UIUC are only a two hour drive away, your best bet....


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Mario Portillo, hbtusainc at yahoo.com

On Tuesday, August 11, 2020, 3:56 AM, Football <yaofootball at gmail.com> wrote:

Hi Jerry,
UIUC Material Research Laboratory has ALDs that can deposit what you need. Please refer to the website for more details. UIUC is at Champaign Urbana which is not far away from you. https://mrl.illinois.edu/facilities/equipment/savannah-s100-atomic-layer-deposition-cambridge-nanotech
Regards,Fubo Rao,Ph.D. 
Materials Research Laboratory

TheGrainger College of Engineering
University of Illinois at Urbana-Champaign
104 S. Goodwin Ave. Urbana, IL 61801
Office: 217-244-6202
Email: frao at illinois.edu

  

On Mon, Aug 10, 2020 at 11:05 AM Shepard, Jeremiah J <jshepar at purdue.edu> wrote:

All,Good morning!  I am an engineer with Purdue's Birck Nanotechnology fab.  Our ALD system has went down and will be down for several weeks.  I am looking for alternatives for our researchers to use until our system comes back online.  We are located in West Lafayette, Indiana and options would need to be within a few hours driving distance of our location, or provide the service through mail.  
Our system is equipped with AlOx, HfOx,  and SiOx.  The majority of our users are growing AlOx and HfOx.  We have many users interested in low temp growths at 90 to 110 C and we have a limit of 50 nm film thickness.  We also have many users growing at more traditional 200 C temps.  I would expect work coming from our fab to fall within these parameters.
Any leads would be greatly appreciated!
Thank you,Jerry Shepard
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