[labnetwork] Conformal electron beam resist coating over 3D structures

[John Hagopian]

Hi Adam

How did you make these, we are interested in your process?  Will ask my process guys if they have any ideas on how to coat.

John

> On Aug 18, 2020, at 5:11 PM, Adam Legacy <dradamlegacy at gmail.com> wrote:
> 
> Hi,
> We need to coat 3D pyramidal structures (similar to the picture) with 300 nm EBL resist ZEP520A. The height of the pyramid is around 5 microns. The target resists thickness is around 300 nm. The pyramids are on a 100mm diameter wafer and made out of SiO2.
> Anyone can provide such a service? Do anyone has experience coating similar micro-hills? I spin-coated some shallow 1-micron cavities before with the same resist and it was successful conformal coating. I may need to spray coat or resist evaporation service for this application. What will be suitable for this?
> Please advise.
> Best regards,
> Adam.
> 
> <getImage.jpg>
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