[labnetwork] Adding TEOS to LPCVD furnace

[Nava Ariel-Sternberg]

Happy Friday everyone, 

I hope you and your families are doing well in these weird times. 

We were asked to look into adding a TEOS capability to our LPCVD furnace. 

Has any of you done it? Could you advise on the main steps and things to
look out for? 

Thanks and stay healthy (and happy as much as possible),

Nava

 

 

Nava Ariel-Sternberg, Ph.D.

Director of CNI Shared Labs

Columbia University

CEPSR/MC 8903 

530 west 120th st. NY

NY 10027

Office: 212-8549927

Cell: 201-5627600

 

 

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