[labnetwork] Adding TEOS to LPCVD furnace

[RIchard DeVito]

Nava

Iwould add to Rich's comment that there are several companies, MKS being
one of them, that make traps specifically for TEOS effluent...

Rich DeViito

On Fri, Aug 28, 2020 at 3:37 PM Morrison, Richard H., Jr <
rmorrison at draper.com> wrote:

> When I was at Kopin we used LPCVD TEOS, it is a maintenance hog. Make sure
> you have a trap on the pump line before you hit the pumps, needs to be
> cleaned often and it is a sickly sweet smell, like ethanol. Make sure you
> use a tube liner to protect the tube. Lots of flakes on the vacuum side and
> pay attention to the tube output it likes to clog there. We used a roots
> blower and every year it needed to be rebuilt due to TEOS deposition.
>
>
>
> One the updide TEOS is a great material, we used to densify it with a long
> anneal at say 1000c.
>
>
>
> Hopes this helps
>
>
>
> Rick
>
>
>
>
>
> Richard H. Morrison
>
> Principal Member of the Technical Staff
>
> Draper
>
> 555 Technology Square
>
> Cambridge, MA
>
> 02139-3573
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>
> Work  617-258-3420
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> Cell  508-930-3461
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>
>
> *From:* labnetwork-bounces at mtl.mit.edu [mailto:
> labnetwork-bounces at mtl.mit.edu] *On Behalf Of *Nava Ariel-Sternberg
> *Sent:* Friday, August 28, 2020 11:04 AM
> *To:* labnetwork at mtl.mit.edu
> *Subject:* [labnetwork] Adding TEOS to LPCVD furnace
>
>
>
> Happy Friday everyone,
>
> I hope you and your families are doing well in these weird times.
>
> We were asked to look into adding a TEOS capability to our LPCVD furnace.
>
> Has any of you done it? Could you advise on the main steps and things to
> look out for?
>
> Thanks and stay healthy (and happy as much as possible),
>
> Nava
>
>
>
>
>
> Nava Ariel-Sternberg, Ph.D.
>
> Director of CNI Shared Labs
>
> Columbia University
>
> CEPSR/MC 8903
>
> 530 west 120th st. NY
>
> NY 10027
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> Office: 212-8549927
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> Cell: 201-5627600
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