[labnetwork] GCA/MANN 3600F Pattern Generator support

[Shawn Wright]

Hi Mike,

You could contact Randy Ellsworth <mailto:rellsworth at austin.rr.com> with Stepper Care Services.  We have a service contract with them for our AutoStep 200 and they have a lot of experience with these tools, and have parts.  They even got us back in tip-top shape after a pretty serious flood that filled up the environmental chambers HEPA filter and rained over the whole system.

Thanks,
Shawn Wright
Lead Research Engineer
Lurie Nanofabrication Facility
University of Michigan



> On Dec 4, 2020, at 9:31 AM, Michael Call <michael.call at maine.edu> wrote:
> 
> We have an issue with "Focus Signal lost" and "time out" errors on our pattern generator.  Sometimes the column will attempt to focus off of the glass plate(laser system losing counts?).  I've cleaned and oiled the stages, changed plates and all of the usual, but with no luck.  I know that Bob Scruton passed away a few years ago.  Has anyone taken over the service of these machines?
> 
> Thanks,
> 
> -- 
> Mike Call 
> Research Engineer
> University of Maine 
> Frontier Institute for Research in Sensor Technologies (FIRST)
> Coordinated Research entities Cleanroom 
> ESRB Barrows Hall room 294
> 207-581-3382
> <image.png>
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