[labnetwork] XeF2 supplier?

John Nash jcn8004 at rit.edu
Tue Feb 4 08:06:43 EST 2020


Does anyone know of a reliable supplier of XeF2? We have a Xactics XeF2 system that will be running out soon. I have reached out to Pelchem, Electronic fluorocarbons and Linde over the last 6 months and none are able to help. Thanks in advance for all recommendations.

Regards,

John C Nash
SMFL - Technician
Rochester Institute of Technology
Semiconductor & Microsystems Fabrication Laboratory
82 Lomb Memorial Dr.
Bldg. 17-2627
Rochester, NY 14623

585 478-3835 cell
john.nash at rit.edu<mailto:john.nash at rit.edu>
www.smfl.rit.edu<http://www.smfl.rit.edu>


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