[labnetwork] XeF2 supplier?

[Matthew Moneck]

Hi John,

I'm curious if the issue is with the bottle itself.  We ordered XeF2 last summer, but after 8 weeks or so, we had not received the bottle.  We were told by our vendor that there was delay on Pelchem's side and that ship date was to be determined.  We didn't receive much feedback beyond that.  After waiting another couple weeks, we asked more questions, and found that the issue was the bottle type used on the Xactix tool.  Our tool, and I assume most, use the bottle with a right angle valve.  We were told Pelchem was having trouble sourcing those valves and it was not known when a new bottle could be delivered.  After more questions, we found out our vendor was able to provide a bottle with a straight valve in a short time frame.  As a result, we ordered the alternative bottle and had a new pigtail fabricated to accommodate the change in orientation.

Best Regards,

Matt

--
Matthew T. Moneck, Ph.D
Executive Manager, Claire & John Bertucci Nanotechnology Laboratory
Electrical & Computer Engineering | Carnegie Mellon University
5000 Forbes Avenue, Pittsburgh, PA 15213-3890
Phone:  412-268-5430
ece.cmu.edu<http://www.ece.cmu.edu>
nanofab.ece.cmu.edu<http://www.nanofab.ece.cmu.edu>

From: labnetwork-bounces at mtl.mit.edu <labnetwork-bounces at mtl.mit.edu> On Behalf Of John Nash
Sent: Tuesday, February 4, 2020 8:07 AM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] XeF2 supplier?

Does anyone know of a reliable supplier of XeF2? We have a Xactics XeF2 system that will be running out soon. I have reached out to Pelchem, Electronic fluorocarbons and Linde over the last 6 months and none are able to help. Thanks in advance for all recommendations.

Regards,

John C Nash
SMFL - Technician
Rochester Institute of Technology
Semiconductor & Microsystems Fabrication Laboratory
82 Lomb Memorial Dr.
Bldg. 17-2627
Rochester, NY 14623

585 478-3835 cell
john.nash at rit.edu<mailto:john.nash at rit.edu>
www.smfl.rit.edu<http://www.smfl.rit.edu>


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