[labnetwork] Plumbing new gases in ICP-RIE gas pod

[Dennis Schweiger]

Kevin,

good afternoon.  You have an interesting assortment of technologies in your
gas box, micro-fit, and the older TB7 weld hardware.  Since your two "new"
gases are relatively inert, I would pick the simplest install to make them
active.  Typically the bypass arrangement you see on a couple of the
channels is for when you need to remove the MFC, and it's plugged.  If you
were using a reactive gas, the bypass gives you a way to evacuate both ends
of the MFC, making it "safe" to remove.

Dennis Schweiger
University of Michigan/LNF
Facilities

734.647.2055 Ofc


On Thu, Jan 23, 2020 at 11:52 AM Kevin M McPeak <kmcpeak at lsu.edu> wrote:

> Dear Colleagues,
>
> Here at LSU, we want to add C4F8 and CHF3 gases to our Oxford ICP100
> system. The gas pod (see attached photo) currently has the following gases
> plumbed from top to bottom: O2, N2, CF4, and SF6. Notice, the current CF4
> and SF6 lines have additional valves and plumbing.
>
> When I add the C4F8 and CHF3 do you recommend I plumb them like the O2 and
> N2 gases (filter -> MFC -> valve) are or do I need to add the additional
> valves and plumbing like the SF6 and CF8 lines are? We can do either but
> the SF6/CF4 method is a lot more money and time. This is an old gas pod,
> circa 1995 and Oxford has limited information. and advice.
>
> NOTE: The two output lines (top line and 3rd from top) from the gas pod
> get merged at the tool before entering the instrument. I am not sure why it
> was plumbed this way back in 1995.
>
> Regards,
> Kevin
>
> --
> Kevin M. McPeak
> Assistant Professor | LSU Dept. of Chemical Engineering
> 225-578-0058 | mcpeaklab.com | lsu.edu/nanofabrication
>
> _______________________________________________
> labnetwork mailing list
> labnetwork at mtl.mit.edu
> https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork
>
-------------- next part --------------
An HTML attachment was scrubbed...
URL: <https://mtl.mit.edu/pipermail/labnetwork/attachments/20200123/ab8d2a67/attachment.html>