[labnetwork] Plumbing new gases in ICP-RIE gas pod

[Fouad Karouta]

Hi Kevin,

I agree with previous comments about the bypass not required for CF4 and SF6 and hence not required for CHF3 and C4F8.

About C4F8 we had some flow issues ever and we ended up heating the line that solved the issue. Am not sure if this was related to a different cause but I thought to share the information here.

Best regards,
Fouad Karouta

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-----Original Message-----
From: labnetwork-bounces at mtl.mit.edu <labnetwork-bounces at mtl.mit.edu> On Behalf Of Morrison, Richard H., Jr
Sent: Friday, 24 January 2020 4:05 AM
To: Kevin M McPeak <kmcpeak at lsu.edu>; labnetwork at mtl.mit.edu
Subject: Re: [labnetwork] Plumbing new gases in ICP-RIE gas pod

Rick Morrison here from Draper, seems very curious that the CF4 and SF6 lines have a bypass and an input valve. Looks like this is a bypass to maybe vacuum pump the lines during gas bottle hookup or some other function. If that is what those are used for then I would plumb the new gas the same way.

What part of the manifold are you tying the new gases into looks like you have 2 slots open where the SF6 and CF4 lines are.

Rick


-----Original Message-----
From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Kevin M McPeak
Sent: Thursday, January 23, 2020 8:42 AM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] Plumbing new gases in ICP-RIE gas pod

Dear Colleagues,

Here at LSU, we want to add C4F8 and CHF3 gases to our Oxford ICP100 system. The gas pod (see attached photo) currently has the following gases plumbed from top to bottom: O2, N2, CF4, and SF6. Notice, the current CF4 and SF6 lines have additional valves and plumbing.

When I add the C4F8 and CHF3 do you recommend I plumb them like the O2 and N2 gases (filter -> MFC -> valve) are or do I need to add the additional valves and plumbing like the SF6 and CF8 lines are? We can do either but the SF6/CF4 method is a lot more money and time. This is an old gas pod, circa 1995 and Oxford has limited information. and advice.

NOTE: The two output lines (top line and 3rd from top) from the gas pod get merged at the tool before entering the instrument. I am not sure why it was plumbed this way back in 1995.

Regards,
Kevin

--
Kevin M. McPeak
Assistant Professor | LSU Dept. of Chemical Engineering
225-578-0058 | mcpeaklab.com | lsu.edu/nanofabrication

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