[labnetwork] Looking for PECVD TEOS capability

[Aebersold,Julia W.]

Jorg, our Oxford PECVD has TEOS capabilities and we work with external clients all the time.  We'd be glad to assist you with this process.

Cheers!

Julia Aebersold, Ph.D.
Manager, Micro/Nano Technology Center
University of Louisville
Shumaker Research Building, Room 233
2210 South Brook Street
Louisville, KY  40292
(502) 852-1572

http://louisville.edu/micronano/

From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Jorg Scholvin
Sent: Monday, July 13, 2020 11:02 AM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] Looking for PECVD TEOS capability

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Hi Labnetwork:

We have a small group of users who are in need of periodic PECVD TEOS deposition (400C or below), on pieces or up to 6" wafers.

Our PECVD TEOS tool has not been as reliable as we like, and it would be great to offer our users an alternative during tool downtime.

If you have PECVD TEOS capabilities, and are able to process samples on behalf of outside users (shipping back and forth), please let me know - we'd be delighted.  If preferred we can also facilitate the interactions so you'd only have to deal with one point of contact (for instructions, shipping, billing etc).

Thanks!

-Jorg
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