[labnetwork] laboratory sputter deposition equipment

[Dwayne Chrusch]

Angstrom Eng., Kurt J. Lesker, Semicore.

https://angstromengineering.com/tech/magnetron-sputtering/
https://www.lesker.com/newweb/ped/physical-vapor-deposition-systems.cfm
http://www.semicore.com/sputtering-systems


Regards,

Dwayne D. Chrusch, MSc.
Operations Manager, Training & Safety Coordinator
Nanosystem Fabrication Lab (NSFL)
E3-471 Engineering
75A Chancellor's Circle
University of Manitoba
Winnipeg, Manitoba
Canada, R3T 5V6
Tel: +1 (204) 474-8246
Fax +1 (204) 261-4639


> On Jul 17, 2020, at 3:30 AM, Guido Janssen - 3ME <G.C.A.M.Janssen at tudelft.nl> wrote:
> 
> ********************************************************
> Caution: This message was sent from outside the University of Manitoba.
> ********************************************************
> 
> Dear colleagues
> 
> Here in Delft we are in the proces of replacing our 16 years old AJA sputter tool, used for proces development and materials science studies.
> We’re looking for a system with three 2” targets in sputter down configuration able to handle small samples as well as 100 mm wafers. DC and RF, heated substrate holder with sample bias option, turbo pumped and equiped with a load lock. 
> Do you know of any supplier other than AJA that offers such a system?
> 
> Sincerely
> Guido Janssen
> TU Delft
> g.c.a.m.janssen at tudelft.nl
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