[labnetwork] laboratory sputter deposition equipment

[Lingley, Andrew]

We are also very happy with Angstrom Engineering. We have two evaporators and one sputter tool. They provide great service and their instrumetns are simple and easy to operate.
Best regards,
Andy Lingley
Montana Microfabrication Facility

From: labnetwork-bounces at mtl.mit.edu <labnetwork-bounces at mtl.mit.edu> On Behalf Of Peter Gordon
Sent: Friday, July 17, 2020 10:08 AM
To: Shimon Eliav <shimonel at savion.huji.ac.il>
Cc: labnetwork at mtl.mit.edu; Mike Miller <mmiller at angstromengineering.com>
Subject: Re: [labnetwork] laboratory sputter deposition equipment


I have worked with Angstrom a fair bit and highly recommend them as well.

Cheers,
Peter


On Fri, 17 Jul 2020 at 11:41, Shimon Eliav <shimonel at savion.huji.ac.il<mailto:shimonel at savion.huji.ac.il>> wrote:
[External Email]

Hi Guido,
I recommend Angstrom Engineering: https://angstromengineering.com/
They are great.
Contact person: Mike Miller (Cc).
Regards,
Shimon

-----Original Message-----
From: labnetwork-bounces at mtl.mit.edu<mailto:labnetwork-bounces at mtl.mit.edu> [mailto:labnetwork-bounces at mtl.mit.edu<mailto:labnetwork-bounces at mtl.mit.edu>] On Behalf Of Guido Janssen - 3ME
Sent: Friday, 17 July 2020 11:30
To: labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>
Subject: [labnetwork] laboratory sputter deposition equipment

Dear colleagues

Here in Delft we are in the proces of replacing our 16 years old AJA sputter tool, used for proces development and materials science studies.
We’re looking for a system with three 2” targets in sputter down configuration able to handle small samples as well as 100 mm wafers. DC and RF, heated substrate holder with sample bias option, turbo pumped and equiped with a load lock.
Do you know of any supplier other than AJA that offers such a system?

Sincerely
Guido Janssen
TU Delft
g.c.a.m.janssen at tudelft.nl<mailto:g.c.a.m.janssen at tudelft.nl>
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--
Peter G. Gordon, PhD
CU NanoFab Facility Administrator
Department of Chemistry
Carleton University
(613) 520-2600 ext.7561
https://carleton.ca/fanssi/

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