[labnetwork] Plasticware for HF/BOE processing single 6" wafers

[Bill Kiether]

Hello,

We have a project which requires a significant amount of HF/BOE processing
on single 6" wafers with a premium on purity and safety.  Outside of
Entegris, does anyone have a preferred vendor or product set for handling
HF dips for these wafers?  Especially interested in products that will
allow the solution to be changed very frequently with safety as a premium.

Bill Kiether, PhD
Sr Research Scientist
NCSU Nanofabrication Facility
wjkiethe at ncsu.edu
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