[labnetwork] C4F8 being hard to find?

[Dennis Schweiger]

Guy,

We used to purchase C4F8 from Concord Specialty Gases (1-800-818-5109).
However back in 2013 we switched and now use our local specialty gas vendor
(Cryogenic Gases (313)835-5513) for sourcing this material as it was
less hassle to return the empties.  I am not sure who they're using as the
supplier, but will check with them.

Dennis Schweiger
University of Michigan/LNF

734.647.2055 Ofc

"People can be divided into 3 groups - those that make things happen, those
that watch things happen, and those that wonder what happened."  Within
which group do you belong?


On Wed, Nov 25, 2020 at 8:30 AM DeRose, Guy A. <derose at caltech.edu> wrote:

> Hello community,
>
>
>
> From the time we re-opened our cleanroom back in June through now, we have
> had challenges sourcing C4F8 (Halocarbon C318) gas for our plasma etch
> tools.  We have tried three different vendors, and the lead times have been
> unusually long.  Are there any gas suppliers that any of you have had good
> luck sourcing this gas within a couple of weeks?  I have been waiting for
> one cylinder to be shipped since October 5 and am still waiting.  We have
> been trying to get enough to have a spare on hand, but sourcing has been an
> issue to the point of running empty while waiting for a replacement.
>
>
>
> Thanks,
>
> Guy
>
>
>
> Guy DeRose, PhD, Member of the Professional Staff
>
> Associate Director of Technical Operations, Kavli Nanoscience Institute
>
> California Institute of Technology, Pasadena, CA USA
>
> (O) 1-626-395-3423 (M) 1-626-676-8529
>
> http://kni.caltech.edu
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