[labnetwork] looking for CF4 RIE

[Felix Jaeckel]

Hi everyone,

since our local RIE is currently down, we are looking for someone who could perform CF4 etching of SiN (~1um) for us on 
a few 4" Si wafers.

Bonus would be if you had a SPTS Xactix E1 (or similar) XeF2 tool to perform an added etch step.

The wafers would come pre-patterned with photoresist (covering Cu/Mo/SiN/SiO2/Si).

If you are able to help, please contact me off-list with a rough idea of cost/compensation. We are hoping for a fairly 
quick turn-around also.

Thank you!

Felix

-- 
Felix Jaeckel, Ph.D.
Associate Scientist
McCammon Astrophysics Lab
Physics Department
University of Wisconsin - Madison
1150 University Avenue
Madison, WI  53706-1390
608 265-8958