[labnetwork] Sputtering Boron Nitride

[Mark Hofheins]

Does anyone know what contaminates might happen sputtering Boron Nitride in main chamber used with other targets?


Mark Hofheins

mhofheins at unm.edu<mailto:mhofheins at unm.edu>

Cell  505-259-9278

Office 505-272-7506



Micro Electronics Technician

Manufacturing Engineering/

School of Engineering

University of New Mexico MTTC

800 Bradbury S.E.  Suit 169

Albuquerque, New Mexico

87106-4346

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