[labnetwork] Cleanroom elevated floor

[Dennis Schweiger]

Shimon,

good morning.  Here at UofMichigan we have both a raised floor cleanroom,
and low side wall return cleanroom.  The raised floor is a catch-all for
all kinds of debris/pieces/parts, and unless you make a conscious effort to
pull the floor and vacuum under there, it does collect.  As the facility
guy, I've spent many hours vacuuming that surface whenever we do work in
that underfloor plenum space.  Even with the amount of stuff it collects
and extra work required to keep it clean, I still wouldn't trade it for the
low side wall return section.  The raised floor provides another level of
flexibility in the fit up of tools when you have to route some type of
utility up from the subfab.  We can talk more if you'd like to further
discuss it.

Good luck with your design, now is the time to make the correct choices,

Dennis Schweiger
Facilities Superviser
University of Michigan/LNF

734.647.2055 Ofc

On Mon, Dec 13, 2021 at 7:48 AM Shimon Eliav <shimonel at savion.huji.ac.il>
wrote:

> Hello Everybody,
>
>
>
> We are designing a new cleanroom and I think to use an elevated floor to
> accommodate part of the utilities and serve as air return path to the
> chase. The air-conditioning designers didn’t like the idea: they argue it
> is expensive and difficult to clean.
>
> What is your experience with this? How clean that space below the elevated
> floor?
>
>
>
> Thanks in advance for your input.
>
>
>
> Regards,
>
>
>
> Shimon
>
> The Hebrew University of Jerusalem
>
> The Unit for Nano Fabrication - UNF
>
> Jerusalem - ISRAEL
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