[labnetwork] custom mixing gas chemistries

Lewis,William blewis at eng.ufl.edu
Wed Feb 3 17:02:17 EST 2021


Matheson Trigas should be able to do this for you.


Bill Lewis
Research Service Center
University of Florida
1041 Center Dr
Gainesville, FL 32611
Desk 352-273-2285



From: labnetwork-bounces at mtl.mit.edu <labnetwork-bounces at mtl.mit.edu> On Behalf Of Tony L Olsen
Sent: Wednesday, February 3, 2021 1:09 PM
To: Dennis Schweiger <schweig at umich.edu>; Fab Network <labnetwork at mtl.mit.edu>
Subject: Re: [labnetwork] custom mixing gas chemistries

[External Email]

Dennis

We are required to order all our gases through Campus General Stores.  They use Airgas for all gases, but the Airgas rep works with other vendors when they can't meet the request.  I have both a 6% and 9% PH3 in Silane on-site in 7liter cylinders with DISS (CGA 632) fittings and pneumatic valve.  They were provided by AirLiquide (who acquired Airgas).

tonyO


Tony Olsen
Nanofab Cleanroom Supervisor/Process Engineer
University of Utah
36 S Wasatch Drive, Suite 2500
Salt Lake City, UT  84112
801-587-0651
www.nanofab.utah.edu<https://urldefense.proofpoint.com/v2/url?u=http-3A__www.nanofab.utah.edu&d=DwMFAg&c=sJ6xIWYx-zLMB3EPkvcnVg&r=KLqajKKMPd-Sg2KTwpmzjQ&m=pA_aWTS1UTSyXfRNK_Rc-MKMLK0I2C3wjBeUeUWzSd8&s=6SGNtR0tEsW_COyCgKPD79Sj8eK0VlmdxucuKIRQuZI&e=>



From: Dennis Schweiger <schweig at umich.edu<mailto:schweig at umich.edu>>
Sent: Wednesday, February 3, 2021 08:07
To: Fab Network <labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>>
Subject: [labnetwork] custom mixing gas chemistries

Good morning all,

Who have you used to supply the custom gas mixes for your fab, particularly the HPM products?  We have an application where we want to procure some 15%PH3 in Silane, and the current provider has fallen on their face repeatedly in over-promising, and under-performing.  We're typically looking at smaller cylinder sizes (4-6" diameter, and 16-24" tall), with DISS cylinder valves.

I have to believe this is a niche market, but someone must be doing it....

Thank you,

Dennis Schweiger
University of Michigan/LNF
Facilities Supervisor

734.647.2055 Ofc

"People can be divided into 3 groups - those that make things happen, those that watch things happen, and those that wonder what happened."  Within which group do you belong?
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