[labnetwork] wafer bonding and thinning

Aebersold,Julia W. julia.aebersold at louisville.edu
Fri Feb 5 16:22:32 EST 2021


Hi Travis.  The MNTC in Louisville offers anodic bonding, but we are not as skilled in wafer thinning.

http://louisville.edu/micronano/
[http://louisville.edu/micronano/files/images/photos/slide6]<http://louisville.edu/micronano/>
Welcome to the MNTC - We are open! — Micro/Nano Technology Center<http://louisville.edu/micronano/>
The Micro/Nano Technology Center (MNTC) is a class 100/1000 $30 million 10,000 ft 2 cleanroom facility and the Huson Imaging & Characterization Laboratory.
louisville.edu

Cheers!


Julia Aebersold, Ph.D.

Manager, Micro/Nano Technology Center

University of Louisville

2210 South Brook Street

Shumaker Research Building, Room 233

Louisville, KY  40292

(502) 852-1572

http://louisville.edu/micronano/<http://louisville.edu/micronano>


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Sent: Friday, February 5, 2021 11:34 AM
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Subject: [labnetwork] wafer bonding and thinning


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Hi

We have a project in our lab that requires some wafer to glass bonding. Are there any labs that offer this service or any vendors that you have used for a similar process? We are looking for anodic bonding.

After bonding we need the silicon thinned to ~50um.  Does anyone offer this or have a vendor that they have worked with?

Thanks
Travis
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