[labnetwork] Pump for load lock on ASM Polygon 8200 Cluster tool

[Jeff Hawks]

Hi Sandra,

 

Most scroll pump manufactures sell tip seal replacement kits along with replacement procedures on YouTube. I believe they recommend annual tip seal maintenance. 

 

Best regards,

 

Jeff Hawks

Hawks Technical Services LLC.

2715 Swamp Creek Rd.

Green Lane, PA. 18054

C 215-872-0944

 

 

 

From: labnetwork-bounces at mtl.mit.edu [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Sandra Malhotra
Sent: Friday, February 12, 2021 4:25 PM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] Pump for load lock on ASM Polygon 8200 Cluster tool

 

Howdy All,

We are having issues with a scroll pump for the load lock on an ASM Polygon 8200 Cluster tool. Does anyone have a recommendation for a better type of pump and model to use? I understand a pump capable of 16 cfm that can maintain 1 - 3 T should do the trick.

 

Thanks!


 

-- 

Sandra G. Malhotra, Ph.D.  |  Technical Lab Manager

AggieFab Nanofabrication Facility
Department of Electrical & Computer Engineering, College of Engineering | Texas A&M University
3253 TAMU | College Station, TX 77843
ph: 979.845.3199  |   <mailto:hprichard at tamu.edu> sandra.malhotra at tamu.edu
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TEXAS A&M UNIVERSITY | FEARLESS on Every Front

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