[labnetwork] SUSS mask aligner consumable replacement

[Joonhyeong Park]

Hello,

What is your model of SUSS aligner?
It is straightforward to replace the ellipsoidal reflector for MJB3, MJB4 and MA6. The reflector costed around $860 at SUSS two years ago. I heard that there is a reconditioning service or some companies are selling the reconditioning part with sending old reflector.
Make sure that you turned off the UV lamp power and wait at least 15 min with keeping N2 line to cool the lamp. When you open the lamp house, remove any dust and clean the optic component at lamp house with IPA.
After replacing the reflector, you need to adjust the optics using x, y, x knobs and intensity meter.

Regards,

Joon Park
Brick Nanotechnology Center
Purdue University



On Monday, January 4, 2021, 3:56:39 PM EST, Nava Ariel-Sternberg <na2661 at columbia.edu> wrote: 






Hi all, 
I hope you all had a good and relaxing break. Happy New Year! 
I was hoping to see if anyone has ever replaced the ellipsoidal reflector in a SUSS mask aligner and can provide some assistance/tips. It shouldn’t be too complicated but we want to make sure we do it right and don’t miss anything that could potentially degrade the tool’s performance. 
The company is refusing to help us. 
Any procedures/pointers would be greatly appreciated!
Nava
 
Nava Ariel-Sternberg, Ph.D.
Director of CNI Shared Labs
Columbia University
CEPSR/MC 8903 
530 west 120th st. NY
NY 10027
Office: 212-8549927
Cell: 201-5627600
 
 
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