[labnetwork] Low Z passivating layer

[Miller, Dale A.]

Labnetwork,

I am developing a ~1.5 microns of SiO2 via a Sloan RF magnetron. I am running at 10mT, 200 watts with a Cu substrate at ~ 300 degree C. I am getting a slightly brown film that seems to be conductive. Anybody have any ideas? Any ideas of other materials to deposit to get a passivating layer?

Thanks,

Dale Miller
Master Science and Engineering Technician
APFD -Coating Lab
SLAC National Accelerator Laboratory
926-5202

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