[labnetwork] vanadium dioxide sputtering

[Demis D. John]

We also have a VO2 deposition that we perform relatively regularly (few
times a year) for various external customers.
AJA reactive sputtering.
Single-wafer load, and we need ~3 weeks notice lead time to schedule the
Vanadium target install.  You can give my contact info to your customer or
we can bill to you lab, whichever you prefer.
— Demis




On Thu, Jun 10, 2021 at 09:08 Iulian Codreanu <codreanu at udel.edu> wrote:

> Hi Darick,
>
> We have a pulsed laser deposition (PLD) system here at UD which is mostly
> used for Vanadium oxide deposition. PLD is more suited for depositing
> oxides than sputtering.
>
> Please send me a note if you would like to discuss.
>
> Cheers,
>
> Iulian
>
>
> iulian Codreanu, Ph.D.
> Director, Nanofabrication Facility
> University of Delaware
> Harker ISE Lab, Room 163221 Academy Street
> Newark, DE 19716 <https://www.google.com/maps/search/221+Academy+Street%0D%0ANewark,+DE+19716?entry=gmail&source=g>
> 302-831-2784http://udnf.udel.edu
>
> On 6/9/2021 7:43 PM, Darick Baker wrote:
>
> We have a lab user who is interested in sputtering vanadium dioxide. I
> realize this has been asked before without an answer, but I thought I'd try
> again. Does anybody have a VO2 process running and would be willing to do
> some depositions for us?
> Barring that, does anybody have any tips or successes with reactively
> sputtering VO2?
>
> Thanks for the help.
>
> --
> Darick Baker, PhD
> Business Outreach and Customer Development
> New User Orientation
> Research Engineer - Deposition
> Washington Nanofabrication Facility (WNF)
> University of Washington
> Fluke Hall 115, Box 352143
> Desk: 206.221.8265 Cell: 206.395.4049
> fab-support at wnf.uw.edu
> https://www.wnf.washington.edu/
> Pronouns: he/him
>
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-- 
-- Demis

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         Demis' Contact Info
<https://wiki.nanotech.ucsb.edu/wiki/Demis_D._John>
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