[labnetwork] Plasmatherm Apex ICP High Temperature Operation

[Bruce Tolleson]

Dear Labnetwork,
  Our Plasmatherm Apex ICP has the high temperature option installed to run as high as 200°C.  We are trying to determine the actual temperature of the lower electrode to substrate contact. The display temperature verses actual temperature has an offset and we are trying to determine what that offset is. Has anyone else been able to measure this?
Thank you,

Bruce E. Tolleson
Rochester Institute of Technology
82  Lomb Memorial Drive, Bldg 17-2627
Rochester, NY 14623-5604
(585) 478-3836
[http://www.rit.edu/~962www/logos/tiger_walking_rit_color.jpg]

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