[labnetwork] Plasma etch PE-100 can't generate RF

[Kam Sang Kwok]

Hi,

I have a RIE system (PE-100, Plasma etch) that stopped working last week. Gas flow and pressure work fine in the system, but no RF is generated.

I am wondering if there is any technician who can look at my system in Maryland.

Best,

Mark Kwok
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