[labnetwork] Yellow filters for litho room: what specs are out there?

[Dennis Schweiger]

Shane,

When we migrated to LED, replacing T-8's with an LED version, we used a
product from this company for the areas we wanted to keep as "yellow"
light.  We've had them in since May of 2017 with no issues.

https://www.ergomart.com/ergonomic-furniture/fluorescent-light-filters/tapr50-uv-light-filter

Dennis

734.647.2055 Ofc


On Thu, May 27, 2021 at 3:07 PM Xin (Shane) GUO <sguo18 at yorku.ca> wrote:

> Hello Mario,
>
> I saw your past post regarding amber UV filter films for the cleanroom. I
> am in a similar situation looking for UV filter films for our cleanroom
> lights. Lithoprotect is also what I have found so far. I am wondering if
> you have identified suppliers from North America and can share such
> information with me.
>
> Best
>
> *Shane Guo, PhD, P.Eng.,* *PMP*
> *Lab Manager*
> *York MicroFab Facilities (YMF)/ESSE*
> C 289-588-6605
> T 416-736-2100 ext 44160
> sguo18 at yorku.ca | lassonde.yorku.ca
> Lassonde School of Engineering | York University
> RM037, Bergeron Building
> 4700 Keele Street Toronto ON, Canada M3J 1P3
>
>
>
> On Thu, Dec 20, 2018 at 8:09 PM Beaudoin, Mario <beaudoin at physics.ubc.ca>
> wrote:
>
>> Dear Labnetworks community,
>>
>> I'm in the process of renovating our cleanroom and want yellow filters
>> that meet the specs of *Lithoprotect*, specifically, I want way less
>> than 1% transmission below 500nm.  *Lithoprotect* (see link below)
>> claims less than 0.001% transmission below about 475nm.  In our old
>> cleanroom, we used to have traditional 1% yellow windows that turned out to
>> be inadequate for our maskless lithography system.
>>
>>
>> https://www.microchemicals.com/technical_information/170823_Lithoprotect_Flyer_EN_Web.pdf
>>
>> Does anyone know of a US supplier that offers similar product?  On the
>> other hand, does anyone know of products that are not quite as performing
>> but still offer say 0.01% transmission below 500nm?  We will be using 405nm
>> and 365nm light with a traditional mask aligner and a maskless system.  We
>> typically use AZ 5214E-IR and nLoF 2020 resists for down to 1um features;
>> some users still use Shipley 1813 and we have another set of groups using
>> SU-8 resists.  We're not committed to any supplier but do require tight
>> performance.
>>
>> I'm cc'ing our cleanroom manufacturer engineers in this thread.
>>
>> Regards,
>>
>> Mario
>> --
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