[labnetwork] Cl-containing precursors on a Picosun ALD tool

[Peter Gordon]

Hi all,

Does anyone have any experience with precursors like TiCl4 that potentially
produce HCl as a byproduct? Is the default Picosun powder trap enough, or
should additional abatement be enforced before the pump (in our case, an
oil pump)?

Thanks in advance,
Peter

-- 
Peter G. Gordon, PhD
CU NanoFab Facility Administrator
Department of Chemistry
Carleton University
(613) 520-2600 ext.7561
https://carleton.ca/fanssi/
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