[labnetwork] ISO 5 Cleanroom RH

[Collins, Deon]

My guess is you are in a relatively dry climate area?

Deon D. Collins

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From: labnetwork <labnetwork-bounces at mtl.mit.edu> On Behalf Of Aju Jugessur
Sent: Monday, October 11, 2021 2:50 PM
To: labnetwork at mtl.mit.edu
Cc: labnetwork <labnetwork-bounces at mtl.mit.edu>
Subject: [labnetwork] ISO 5 Cleanroom RH


Hello all,

I am reaching out to obtain some inputs on your cleanroom relative humidity (RH).
We have designed our ISO 5 cleanroom with RH (40 +/- 5 %). Among other cleanroom fabrication processes, the cleanroom will support EBeam nanolithography work.
The system to control RH within the required specs is quite expensive and I would like to know if anyone in the network is able to relax the RH specs, without compromising processes OR have alternative ways of locally controlling the RH, say in the actual litho. bay areas or hoods?

Your inputs are very much appreciated.

Thanks
Aju




Aju Jugessur Ph.D. IEEE Sr. Member
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