[labnetwork] anhydrous HF vapor suppliers

[Lewis,William]

Hi Darick,

I had a problem getting BCL3 from the regular sources and found some with Custom Gas Solutions.
https://www.customgas.com/

Cheers,
Bill Lewis
Research Service Center
University of Florida
walewis at ufl.edu<mailto:walewis at ufl.edu>
https://rsc.aux.eng.ufl.edu/




From: labnetwork <labnetwork-bounces at mtl.mit.edu> On Behalf Of Darick Baker
Sent: Thursday, October 14, 2021 6:08 PM
To: Fab Network <labnetwork at mtl.mit.edu>
Subject: [labnetwork] anhydrous HF vapor suppliers

[External Email]
Hello,

We have run out of HF in our SPTS uEtch vapor HF etching tool. We are now rushing to get a new cylinder because we have a couple lab users who have a critical need. We have a bottle on order, but the lead time is longer than we or the users are comfortable with.

If anybody has suggestions for alternate sources or knows of someone who may be willing to send us a bottle that we can replace, please let me know.

I've attached an image from the previous bottle in case that can answer any questions.
[cid:image001.jpg at 01D7C1B2.32A91440]

Thanks.

--
Darick Baker, PhD
Research Engineer
Washington Nanofabrication Facility
University of Washington
Fluke Hall 115, Box 352143
(206) 221-8265
Pronouns: he/him
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