[labnetwork] EVG Aligner camera motor issues-anyone else?

[Macdonald, Robert (GE Research, US)]

About 18 months ago we had one of the motors that drives the bottom optic on our EVG 620 aligner fail. As I understand it, there is a light switch that acts as a limit switch. For some reason, this failed, the motor drove itself into a hard stop, overheated, and failed.

We had no root cause for this failure from the field service engineer. It was a difficult fix, and expensive.

Now it appears it may have occurred a second time. We are waiting for confirmation from EVG.

Here is my question: I used a similar EVG 620 aligner at the U. Washington for years. I never heard of this being a problem. Has anyone else encountered a similar problem? If so, did you ever get a root cause and a  fix?

Thanks you,

Robert MacDonald
MEMS Engineer
Microsystems
GE Global Research
1 Research Circle
Niskayuna, NY 12309
Office KWC-1629
Cell  518 312-5646

-------------- next part --------------
An HTML attachment was scrubbed...
URL: <https://mtl.mit.edu/pipermail/labnetwork/attachments/20220407/526dd76c/attachment.html>