[labnetwork] Cleanroom Pressure Setpoint

Shimon Eliav shimonel at savion.huji.ac.il
Sun Apr 10 01:31:07 EDT 2022


Hi Adam,
The pressure set-point for our cleanroom is 15 Pa. Classes 1,000 to 10,000.
We never played with this parameter.
Regards,
Shimon

From: labnetwork [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Adam Pettigrew
Sent: Wednesday, 6 April 2022 22:53
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] Cleanroom Pressure Setpoint

Hey All,

I am curious what others have as a setpoint for their cleanroom pressure relative to an unclean or lower classification cleanroom. I have found some information which suggests 10-15Pa is more than sufficient. We have ours set quite high at 60Pa but it typically sits at 45Pa. If you have tried adjusting the pressure, have you noticed any change in cleanliness/particle counts? Any information would be really appreciated.

Thanks,
Adam

--

Adam Pettigrew

Systems Technician

University of Alberta - nanoFAB

W1-028A ECERF Building

9107 - 116 Street

Edmonton, Alberta

Canada T6G 2V4 Ph: 587-879-1514
www.nanofab.ualberta.ca<http://www.nanofab.ualberta.ca/>
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