[labnetwork] Refill ALD Cylinders

[Frank Flack]

Hi Tony,

I've just been looking into this myself and, while I haven't gone through the refill process yet, we have several cylinders designated to be refilled by Strem Chemicals.  Looking at the paperwork, they can help you figure out whether your cylinders in particular can be refilled.

Best,
Frank

Frank S. Flack
Wisconsin Centers for Nanoscale Technology
Rm. 3120 Engineering Centers Bldg.
1550 Engineering Drive
Madison, WI 53706

________________________________________
From: labnetwork <labnetwork-bounces at mtl.mit.edu> on behalf of Tony L Olsen <tony.olsen at utah.edu>
Sent: Thursday, April 21, 2022 11:50 AM
To: Lab Network (labnetwork at mtl.mit.edu)
Subject: [labnetwork] Refill ALD Cylinders

Does anybody have a source to re-use/refill ALD cylinders?  We have a number of spent cylinders (TMA, 3DMAS, TDMAHf, etc.).  It seems a waste to dispose of them, if they can be re-used.  I’ve found a couple companies that supposedly provide this service, but they have not responded to my inquiries.  Hoping there is a good track record with someone out there.

tonyO


Tony Olsen
Nanofab Cleanroom Supervisor/Process Engineer
University of Utah
36 S Wasatch Drive, Suite 2500
Salt Lake City, UT  84112
801-587-0651
www.nanofab.utah.edu