[labnetwork] Oxidation furnace

[Baur, Armin (Plasma-Therm LLC)]

Sergi,

I have been working with Centrotherm oxidation furnaces for over 15 years and can highly recommend.
https://www.centrotherm.de/en/equipment/c-oxidator

Armin

From: labnetwork <labnetwork-bounces at mtl.mit.edu> On Behalf Of Sergi Lendinez
Sent: Monday, December 5, 2022 10:32 AM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] Oxidation furnace

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Hello everyone,

We are looking into acquiring an oxidation furnace to be able to grow good thermal oxides in Si wafers.

We have found the model GSL1100XIII8 by MTI https://www.mtixtl.com/ThreeZonesTubeFurnace11Quartz-GSL-1100X-XX-III.aspx
[http://www.mtixtl.com/images/products/thumb/gsl1100x11main2.1.jpg]<https://www.mtixtl.com/ThreeZonesTubeFurnace11Quartz-GSL-1100X-XX-III.aspx>
Three Zones Tube Furnace with 6" - 11" Quartz tube and Flanges (1100°C, 12"+12"+12" Heating Zone) - GSL-1100X-XX-III<https://www.mtixtl.com/ThreeZonesTubeFurnace11Quartz-GSL-1100X-XX-III.aspx>
www.mtixtl.com<http://www.mtixtl.com>
Does anyone have any experience with this furnace, or any recommendation for a similar tube furnace (or any other advice)? Our budget for is in the 30k-40k range.

Thank you,
Sergi

---
Sergi Lendinez, Ph. D.
Assistant Director NFF | Louisiana State University
Center for Advanced Microstructures and Devices (CAMD)

6980 Hefferson Highway, Baton Rouge, LA 70803
(225) 578-9378
sergilendi at lsu.edu<mailto:sergilendi at lsu.edu> | lsu.edu/nanofabrication<https://lsu.edu/nanofabrication>

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