[labnetwork] Wafer Bonding Fabrication Service

[Chang, Long]

Hello,

Does anyone provide wafer bonding service for a fee? We need to perform Si-Si bonding and Si-PEEK-Si bonding. The samples are either 3” wafers or Chips. We don’t have the recipe for Si-Si bonding, but I assume there is a standard one. For Si-PEEK-Si, the paper suggests 10-3 mbar vacuum, 345C and 3kN for several minutes. We’d like to verify the bonding using IR transmission imaging. 

Thanks,
Long