[labnetwork] Edwards BOC TPU repair/service
Dennis Schweiger
schweig at umich.edu
Mon Feb 14 15:07:13 EST 2022
Good afternoon all,
We have an older BOC TPU that we're using as our abatement system for a
variety of gases across the fab, and it's in need of some service work.
Does anyone have a contact they would be willing to share? I'm looking for
someone to help us determine exactly what's wrong, and then to offer a
service visit in support of repairing the unit.
Thank you,
Dennis Schweiger
University of Michigan/LNF
Facilities
734.647.2055 Ofc
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