[labnetwork] LPCVD film anomaly

[Andrei Alamariu]

Hello,
A hell of a work indeed!
Usually /most frequent the replacement of the DCS gas delivery line, is just its section from the Quartz tube injector end to the Down-Stream valve. Not the whole gas jungle.
Sometime during Quartz tube replacement the air gets into that line section if a cap is not placed on immediately with N2 purge flow on: close the N2 purge valve after the the line was capped.
Thanks, Andrei

Sent from my iPad

> On Jan 5, 2022, at 3:42 PM, Terre Briggs <terreb at umich.edu> wrote:
> 
> Sorry for the delayed response but we just recently finished up the work needed to fix our bubble issue. The cause of the problem was condensation of the DCS in the gas delivery lines. Our fix was to replace all of the DCS gas delivery lines and their components within the furnace gas box. All 3 tubes now have bubble free Nitride, HTO and LSN films. Thanks to everyone who responded to our request for help in solving this issue. 
> 
> Terre
> 
> On Tue, Aug 3, 2021 at 9:06 AM Terre Briggs <terreb at umich.edu> wrote:
>> Hello All,
>>     We are currently having film quality issues with our LPCVD Low Stress Nitride, HTO and Nitride films. Without getting into all of the details just yet I am sharing with you some SEM images. The anomaly, as our furnace manufacturer describes it, are what look like spheres, or bubbles on the surface of the films. We are pretty confident that the spheres are only on the surface and not down into the film itself.
>> It is very random across the wafers and across the wafer load. After further processing, the spheres come off and leave behind a divot, or crater on the surface. This can also be seen in the SEM images.
>>    My question is, has anyone ever seen anything like this with any of your LPCVD films? I have been working with Tempress for the last several months to resolve the issue, but they have never seen anything like this, and so far we have not made any progress in determining the source. Any help would be appreciated. 
>> 
>> Thanks.....Terre
>>     
>> Terre Briggs
>> Engineer in Research Sr.
>> Lurie Nanofabrication Laboratory
>> University of Michigan
>> 1301 Beal Ave.
>> Ann Arbor, MI 48109
>> 734-320-4470
> 
> 
> -- 
> Terre Briggs
> Engineer in Research Sr.
> Lurie Nanofabrication Laboratory
> University of Michigan
> 1301 Beal Ave.
> Ann Arbor, MI 48109
> 734-320-4470
> 
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