[labnetwork] Looking for POCL3 supplier

[Carsen Kline]

Rob - Though it's been a few years, we were most recently getting it from Versum Materials, who took over from Air Products. They supply our TEOS and Trans-LC, and they're still in Carlsbad, CA where Schumacher were. Contact vmuscso at versummaterials.com, 1-800-837-2724.

Carsen

Carsen Kline
Lab Operations Manager
Stanford Nanofabrication Facility
650-724-8214
snfexfab.stanford.edu
________________________________
From: labnetwork <labnetwork-bounces at mtl.mit.edu> on behalf of Robert Vandusen <RobertVandusen at cunet.carleton.ca>
Sent: Thursday, January 27, 2022 11:44 AM
To: labnetwork at mtl.mit.edu <labnetwork at mtl.mit.edu>
Subject: [labnetwork] Looking for POCL3 supplier


Hi everyone.



I was hoping someone might be able to help lead me in the right direction to find a source for POCL3 (Phosphorus Oxychloride).

I am looking for either a new vessel for our existing setup or possibly a new bubbler setup and source vessel for our Bruce 8 furnace.



We currently have an older JC Schumacher source controller (model 7, PN STC 500) which has a Schumacher 750ml POCL3 vessel (PN POCL3750D).

It looks like the Air Products who took over from J.C. Schumacher no longer supply this product.



If anyone is able to help that would be appreciated.



Thanks

Rob

   Robert Vandusen
   Microfabrication Cleanlab Facility Manager
   Electronics Department
   Carleton University
   room: 4184 Mackenzie Building
   613-520-2600 ext 5761
   Robert_vandusen at cunet.carleton.ca<mailto:Robert_vandusen at cunet.carleton.ca>




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