[labnetwork] Question about ebeam evaporation of antimony triselenide (Sb2Se3)

[Malhotra, Sandra Guy]

Howdy All,
We have a user who would like to deposit antimony triselenide (Sb2Se3) in one of our ebeam evaporation tools. We are concerned about the toxicity of these materials, particularly where bead blasting of the kits is concerned. I'd like to ask the network if anyone has accommodated this material in their PVD tools, and if so, how they mitigated any toxicity concerns?

Thanks in advance for your inputs!

Best,

Sandra G. Malhotra, Ph.D.  |  Technical Lab Manager

AggieFab Nanofabrication Facility
https://aggiefab.tamu.edu/
Department of Electrical & Computer Engineering, College of Engineering | Texas A&M University
3253 TAMU | College Station, TX 77843
ph: 979.845.3199  |  sandra.malhotra at tamu.edu
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TEXAS A&M UNIVERSITY | FEARLESS on Every Front

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