[labnetwork] Large-scale Nanopatterning

[Michael Rooks]

Cornell CNF has an ASML stepper with 200 nm resolution.
https://www.cnfusers.cornell.edu/node/3

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On Sat, Mar 5, 2022 at 8:15 AM Chang, Long <lvchang at central.uh.edu> wrote:

> Hello,
>
> I need to print 300nm dots with center to center spacing of 500nm on a
> hexagonal lattice. Currently doing it with EBL, but need to do it faster
> and cheaper. What are my options? Can this be done with a Stepper somewhere?
>
> Thanks,
> Long
>
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