[labnetwork] Wet bench recessed hot plates

Xuekun Lu xklu at eng.ucsd.edu
Thu Mar 31 13:17:01 EDT 2022


Dear all,

We are trying to redesign our wet benches. We hope to use recessed hot
plates (instead of sitting on the table top, the hot plates will sit in
wells). For this reason, the hotplate controller needs to be remote so it
can be installed outside of the hood. This is for wet processes (acid/base
and solvent benches) for up to 6 inch wafers.

Does anybody have recommendations on what hot plates to buy, and from
where? If you have similar wet benches, would you mind sharing your
dimensions on the well and the hot plates?

Thanks,
Xuekun

----------------------------------------
Xuekun Lu, Ph.D

University of California, San Diego
Calit2 M/C 0436
9500 Gilman Drive
La Jolla, CA 92093-0436

For Fedex Shipping:
Xuekun Lu
University of California, San Diego
Atkinson Hall 5th Floor Front Desk
9500 Gilman Drive
La Jolla, CA 92093

Phone: (858) 246-0411
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E-mail: xklu at ucsd.edu
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