[labnetwork] Lamp for Backside alignment

[Greg Mullins]

Hi Long,
What system is this for?

On my Quintel mask aligner, I use this one!



On Mon, May 9, 2022 at 1:48 PM Chang, Long <lvchang at central.uh.edu> wrote:

> Hello,
>
> Anyone know what the lamp is for backside alignment? There are no markings
> on the lamp with gold reflector to help me find a replacement. We have a
> stock of EKE 12V150W V5KD with silver reflector that we use for frontside
> alignment, see photo. I tried to replace it with our stock lamp anyways,
> but I couldn’t see the alignment mark.
>
> Thanks,
> Long
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-- 
Greg Mullins
R&D Engineer 4
Marvell Nanofabrication Laboratory
University of California at Berkeley
520 Sutardja Dai Hall, MS 1754
Berkeley, CA 94720-1754
Office: (510) 809-8625
Email: gregmullins at berkeley.edu
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