[labnetwork] Cambridge Fiji ALD problems

[Eric Fluckiger]

Dear colleagues,

I have a Cambridge Fiji F200 ALD that has traditionally had driver issues
when turning on the encoder and making the handshake with the Windows PC.
These driver errors have gone so far as to corrupt the hard drive on the
computer, but, I have always been able to reinstall Windows from the BIOS
and get the tool to communicate with the PC.

Just recently, some routine maintenance was performed and the tool was shut
down from the power source (breakers were turned off). Now, after
repowering the tool (following the startup procedure from the manual), the
computer does not have any of the configuration settings (MFC, heater, and
valve locations along with upper and lower limits). Even though the tool
makes the USB connection to the PC when the image of the reactor tries to
load, it disappears and is replaced with what I can only assume is the
default image with no configuration (see attached image). Also, when I go
to load a recipe, it tells me that my recipe parameters are outside of the
upper/lower limits of 0/0.

After reading the manual, I noticed that my software is missing the
"service" tab that allows you to make the configuration and push it to the
tool.

My question: is the configuration for the reactor/MFCs/heaters stored on
the Windows PC that interfaces with the tool, or, is that information
stored on the E-box inside the tool? I have tried reinstalling Windows
several times as well using a different computer and each time the reactor
tries to load the configuration and fails.

Follow-up question: I have reached out to Veeco for technical support
through their support webpage and have not received a response. Does anyone
have any contacts or ALD SMEs that would be able to help me get my ALD back
online?

I would be grateful for any insights or help with regard to this matter.

Yours truly,
Eric Fluckiger
Process Engineer
Utah Nanofab


A picture of what my computer is showing after a successful USB handshake.
Note: the service tab is missing on my software.

[image: IMG_3113 (1).jpg]


The missing system configuration tab. This picture was taken from Fiji
Manual
<https://is.muni.cz/el/1431/jaro2017/F4280/um/69248846/69248852/FIJI_F200_ALD.pdf>.
This is what leads me to believe that the configuration settings are stored
on the tool itself (E-box).

[image: Capture.JPG]
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