[labnetwork] Cambridge Fiji ALD problems

[Carsen Kline]

Eric:

The bulk of the config is stored in a file called setup.ini, located in the Cambridge Nanotech folder. One of ours is attached as an example. If you have plasma and turbo, then more configurations are required under Windows Device Manager for the EdgePort COM port assignments.

We've had great support for legacy Cambridge tools from Veeco with many of the original ALD engineers still working there. Reach them at ALDSUPPORT at veeco.com.

Lastly - backup early, backup often!

Good luck,

Carsen, SNF
________________________________
From: labnetwork <labnetwork-bounces at mtl.mit.edu> on behalf of Eric Fluckiger <eric.fluckiger at utah.edu>
Sent: Thursday, October 13, 2022 10:57 AM
To: labnetwork at mtl.mit.edu <labnetwork at mtl.mit.edu>
Subject: [labnetwork] Cambridge Fiji ALD problems

Dear colleagues,

I have a Cambridge Fiji F200 ALD that has traditionally had driver issues when turning on the encoder and making the handshake with the Windows PC. These driver errors have gone so far as to corrupt the hard drive on the computer, but, I have always been able to reinstall Windows from the BIOS and get the tool to communicate with the PC.

Just recently, some routine maintenance was performed and the tool was shut down from the power source (breakers were turned off). Now, after repowering the tool (following the startup procedure from the manual), the computer does not have any of the configuration settings (MFC, heater, and valve locations along with upper and lower limits). Even though the tool makes the USB connection to the PC when the image of the reactor tries to load, it disappears and is replaced with what I can only assume is the default image with no configuration (see attached image). Also, when I go to load a recipe, it tells me that my recipe parameters are outside of the upper/lower limits of 0/0.

After reading the manual, I noticed that my software is missing the "service" tab that allows you to make the configuration and push it to the tool.

My question: is the configuration for the reactor/MFCs/heaters stored on the Windows PC that interfaces with the tool, or, is that information stored on the E-box inside the tool? I have tried reinstalling Windows several times as well using a different computer and each time the reactor tries to load the configuration and fails.

Follow-up question: I have reached out to Veeco for technical support through their support webpage and have not received a response. Does anyone have any contacts or ALD SMEs that would be able to help me get my ALD back online?

I would be grateful for any insights or help with regard to this matter.

Yours truly,
Eric Fluckiger
Process Engineer
Utah Nanofab


A picture of what my computer is showing after a successful USB handshake. Note: the service tab is missing on my software.

[IMG_3113 (1).jpg]


The missing system configuration tab. This picture was taken from Fiji Manual<https://is.muni.cz/el/1431/jaro2017/F4280/um/69248846/69248852/FIJI_F200_ALD.pdf>. This is what leads me to believe that the configuration settings are stored on the tool itself (E-box).

[Capture.JPG]

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