[labnetwork] ALD of LNO material

[Price, Aimee]

Does anyone have an ALD in which you currently do or could deposit Lithium Niobium Oxide materials?

I have a customer who wants to do this deposition but we do not allow the proposed precursors in our Picosun SunAle ALD for various reasons, including safety concerns and cross contamination.

The precursors suggested were Lithium tert-butoxide, niobium ethoxide, and water.  I think they would be amenable to other precursors if applicable. They referenced two papers:
Nano Energy 78 (2020) 105107
ACS Appl. Mater. Interfaces 2018, 10, 1654−1661

If you have this capability and are willing to work with customers outside your institution, please contact me.

Thanks in advance.

Best,
Aimee Bross Price

Manager, Nanofabrication
The Ohio State University
Nanotech West Lab
Institute for Materials Research
1381 Kinnear Road
Suite 100
Columbus, OH 43212
614-292-2753

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