[labnetwork] In2Se3 sputtering

[Zhichao Wang]

Dear Lab network community,

We have a customer who is interested in sputtering In2Se3 films. In2Se3
does not seem to adversely affect vacuum. But it's listed as category 3
health hazard ("Acute Inhalation Toxicity - Dusts and Mists"). Does anyone
have experience with In2Se3 to share?

Any suggestions/Inputs are highly appreciated.




-- 

*Zhichao (Chao) Wang, Ph.D.*
*Nano Process Specialist*
*UDNF*
*University of Delaware*
*Pronouns: He/Him/His*
*------------------------*
*Office Number：(302) 831-4839*
*221 Academy St.，RM170*
*Newark, DE 19711*
-------------- next part --------------
An HTML attachment was scrubbed...
URL: <https://mtl.mit.edu/pipermail/labnetwork/attachments/20220907/192f63e3/attachment.html>