[labnetwork] Thin film sputtering issue

[Saba Sadeghi]

Dear colleagues,

I was hoping to get your input on a sputtering issue; the pictures attached are from a magnetron-sputtered metal film (200nm), growth rate of 3 A/s at elevated growth temperature. Can you identify these features and what could have caused them?

Thank you very much for your feedback,

Best,
Saba
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