[labnetwork] Ebara Pump Setup

[William Kiether]

I am dead heading the package, it gets to 450 mTorr - still no blower


On Fri, Aug 18, 2023 at 6:54 PM Paolini, Steven <
spaolini at cns.fas.harvard.edu> wrote:

> Most mech pump/ blower packages use pressure as a signal for the blower to
> cut in. I would isolate the package by dead heading the pump and seeing if
> the blower kicks in. If so, you have an upstream vacuum leak that prevents
> the blower from triggering.
>
> Equipment Dood
>
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> ------------------------------
> *From:* labnetwork <labnetwork-bounces at mtl.mit.edu> on behalf of William
> Kiether <wjkiethe at ncsu.edu>
> *Sent:* Friday, August 18, 2023 1:26:36 PM
> *To:* Dennis Schweiger <schweig at umich.edu>
> *Cc:* Lab Network (labnetwork at mtl.mit.edu) <labnetwork at mtl.mit.edu>;
> Philip Barletta <pbarlet at ncsu.edu>; Erik Vick <epvick2 at ncsu.edu>
> *Subject:* Re: [labnetwork] Ebara Pump Setup
>
> No, we are aware of the 30 second delay, and have let it go for up to 10
> minutes - we also haven’t detected any voltage being sent to the blowers
>
> Bill
>
> On Fri, Aug 18, 2023 at 12:29 PM Dennis Schweiger <schweig at umich.edu>
> wrote:
>
> Bill,
>
> On the Ebara A70's we use, there is a delay that is vacuum related between
> the start of the mechanical pump, before the blower fires up.  Is it
> possible that this is your issue?
>
> Dennis
>
> 734.647.2055 Ofc
>
> On Fri, Aug 18, 2023 at 12:21 PM William Kiether <wjkiethe at ncsu.edu>
> wrote:
>
> Hello,
>
> We are trying to test some Ebara dry pump/blower combos that we got from a
> tool donation and are having problems with the setup. The pumps are
> EST200WN models with both a pump and a blower, but the controllers are only
> recognizing them as EST10N, which are smaller units w/o the blower option.
> When powered up, only the pump will turn on. This occurs whether we are
> using the Ebara controller or the remote option with jumpers. The power is
> 208 - 3phase, and we also tried switching the 2 of the phases. Has anybody
> encountered this problem? The Ebara documentation has not been helpful for
> this issue.
>
> Bill Kiether
> NCSU Nanofabrication Facility
>
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